Fabrication of fluorinated polyimide waveguides on copper-polyimide multilayer substrates for opto-electronic multichip modules
説明
We have developed new opto-electronic substrates, which are key components for constructing opto-electronic multichip modules. These substrates consist of optical waveguides (for OEIC chip-to-chip optical interconnection) on copper-polyimide multilayers for high-speed electrical transmission. Low-loss (0.4 dB/cm) fluorinated polyimide ridge waveguides with nearly vertical and smooth sidewalls ( >
収録刊行物
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- Proceedings of IEEE 43rd Electronic Components and Technology Conference (ECTC '93)
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Proceedings of IEEE 43rd Electronic Components and Technology Conference (ECTC '93) 705-710, 2002-12-30
IEEE