Laser-induced damage of optical coatings grown with surface chemical reaction

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We prepared optical thin films grown with surface chemical reactions using TiCl 4 and H 2 O for TiO 2 , Al(CH 3 )3 and H 2 O 2 for Al 2 O 3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be preciously controlled only by the number of cycles. Two-layer TiO 2 /Al 2 O 3 anti-reflection coating with less than 0.2 percent reflection loss at 532nm was fabricated. Laser induced threshold strongly depend on the growth temperature and the introduced gas pressure. They increasing with decreasing the growth temperature and with increasing the introduced gas pressure.

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