Control of nanoparticle formation in reactive plasmas and its application to fabrication of green energy devices

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<jats:p>We are developing “plasma nano-factories” which are bottom-up guided assembly processes and miniature versions of macroscopic conventional factories. Here, we report plasma-based control of the size, size distribution, and structure of nanoparticles, their agglomeration and transport as well as sticking. We apply nano-particle films to green energy devices such as low energy consumption LSI’s, solar cells, and Li ion batteries. Our results show that core-shell nanoparticles are effective for improving performances of these devices.</jats:p>

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