Functional RF Devices Powered by MEMS Technologies

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<jats:p>This paper discusses use of MEMS technologies in radio frequency (RF) frontend. First, configuration of RF front-end in current wireless communication systems is surveyed, and research trends of the flexible RF front-end and software defined radio (SDR) are discussed. Second, various RF tunable filters are introduced, and we discuss how high performances are expected by the use of tunable RF surface and bulk acoustic wave (SAW/BAW) filters provided that above mentioned key technologies are developed. Finally, our attempts for realization of tunable RF SAW/BAW filters are introduced.</jats:p>

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