High-field conduction and breakdown strength in poly-p-xylylene thin film
説明
It was shown experimentally that high-field currents in poly-p-xylylene (PPX) films prepared by vacuum pyrolysis(l) were enhanced by collision ionization. In poly-2-chloro-p-xylylene (PCPX) films containing a chlorine atom in a monomer unit of PPX, the high-field current and EL were suppressed in the low temperature region. Similar phenomena were observed on PFX films treated by RF plasma (plasma-treated PPX: P-PPX). These films showed a higher breakdown strength than PPX films. Chlorine atoms or defects intro duced by the plasma treatment were concluded to act as scattering centers and suppress the collision ionizations.
収録刊行物
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- Proceedings of the Twenty-First Symposium on Electrical Insulating Materials
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Proceedings of the Twenty-First Symposium on Electrical Insulating Materials 231-234, 2005-08-24
IEEE