Nucleation and growth of diamond particles from the vapor phase
この論文をさがす
説明
Abstract High-quality diamond particles up to 0.6 mm in diameter were produced by are discharge plasma chemical vapor deposition. An ethanol-methanol-hydrogen gas mixture at pressures ranging between 250 and 400 torr was used as a reactant gas. The particles were formed by spontaneous nucleation on a molybdenum substrate and grown within a few hours at substrate temperatures as high as 1300 °C. Growth rates in the range 0.1–0.3 mm/h were common. Three experimental techniques aimed at reducing the number of spontaneously formed diamond nuclei were attempted and found feasible. Nuclei density as low as 10 cm −2 were achieved.
収録刊行物
-
- Diamond and Related Materials
-
Diamond and Related Materials 1 157-160, 1992-03-01
Elsevier BV
