Development of an electron optical instrument for evaluation of multi emitters - outline of the instrument
説明
Summary form only given. In this paper, we have developed electron optical instrument for evaluation of multimeters such as field emitter arrays. The instrument is a kind of an emission microscope, in which a magnified image of a specimen itself. The instrument is equipped with a beam illumination system that irradiated the specimen with electron beam or UV light for obtaining secondary (or reflected) electrons or photo electrons from the specimen, and is capable of operating as an FEEM, a PEEM and an LEEM.
収録刊行物
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- IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479)
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IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) 199-, 2004-03-01
Japan Soc. Promotion of Sci