<title>Optical approach for LCD inspection</title>

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説明

Optical inspection technology is very fundamental for TFT (thin film transistor) array and cell processes of the LCD (liquid crystal display) manufacturing which is utilized in IQC (in-line quality control) process. This paper describes a general overview about LCD inspection items and our requirements, and show some optical technology for those inspection items.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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詳細情報 詳細情報について

  • CRID
    1873679867417229440
  • DOI
    10.1117/12.215582
  • ISSN
    0277786X
  • データソース種別
    • OpenAIRE

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