<title>Optical approach for LCD inspection</title>
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説明
Optical inspection technology is very fundamental for TFT (thin film transistor) array and cell processes of the LCD (liquid crystal display) manufacturing which is utilized in IQC (in-line quality control) process. This paper describes a general overview about LCD inspection items and our requirements, and show some optical technology for those inspection items.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 2576 105-114, 1995-08-02
SPIE