Third-overtone resonator using thickness longitudinal mode of 36� Y-LiNbO3
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説明
The energy trapping characteristic of the thickness longitudinal mode propagating in a 36° rotation Y-cut LiNbO3 single crystal is theoretically analyzed. It is found that the fundamental wave has a high-frequency cutoff characteristic and the third overtone has a low-frequency cutoff characteristic. It is shown that a third-order overtone resonator with a small resonant level of the fundamental wave can be obtained. Further, a simulation analysis of the vibration displacement distribution is performed by the finite element method. The device dimensions for further improvement of the degree of suppression of the fundamental wave are experimentally derived. Based on these investigation results, a 34-MHz resonator was fabricated and a third-overtone resonator with a small fundamental response level with a resonance sharpness of 15,000, a capacitance ratio of 97, and a temperature characteristic of approximately –70 ppm/°C was obtained. The resonator is being mass produced as a clock resonator for a microprocessor operating between 25 and 100 MHz. © 1999 Scripta Technica, Electron Comm Jpn Pt 2, 82(7): 50–58, 1999
収録刊行物
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- Electronics and Communications in Japan (Part II: Electronics)
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Electronics and Communications in Japan (Part II: Electronics) 82 50-58, 1999-07-01
Wiley