<title>Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine</title>

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This paper presents the technique of an on-machine precision profile measurement, through a kind of common-path interferometer using a zone-plate. We could analyze profile errors of a spherical mirror on the machine turning at a speed of 900 rpm. The results of experiments are evaluated.© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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