<title>Hollow fiber delivery of F<formula><inf><roman>2</roman></inf></formula>-excimer laser light</title>
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説明
A hollow fiber composed of a glass-tube substrate and an aluminum thin film coated upon the inside of the tube delivers F 2 -excimer laser light with a low transmission loss. It was shown that the fiber should be pressurized with an inert gas to remove the absorption of air.
収録刊行物
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- SPIE Proceedings
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SPIE Proceedings 4253 37-41, 2001-06-04
SPIE