Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy
説明
Using ultraviolet laser ablation, very thin layer removal of a polymer or a glass was found to be possible by using a single laser shot. Elemental analysis with nanometer-scale resolution was demonstrated for polymethyl methacrylate samples in combination with laser-induced fluorescence spectroscopy. Nanometer-scale removal was also possible for silicon and metals by femtosecond laser ablation.
収録刊行物
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- Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557)
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Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557) 1 I-34, 2002-11-13
IEEE