Trial fabrication of PTFE-based E-plane waveguide coupler for short millimeter-wave by SR etching
説明
It has been reported that the SR (synchrotron radiation) etching process is useful to construct PTFE-based microstructures. This paper treats a trial fabrication of the PTFE-based E-plane waveguide coupler for short millimeter-wave based on the SR etching process of PTFE, with the aim of developing integrated waveguide circuits. First, a cavity-type 3-dB directional coupler is designed at 180 GHz. In this paper, an integrated PTFE pattern, in which the two 3-dB couplers and the matching section are cascaded, is fabricated. Then, the frequency characteristics of the PTFE-based E-plane waveguide coupler are measured, and the validity of the fabrication process is verified.
収録刊行物
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- 2015 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT)
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2015 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT) 127-129, 2015-08-01
IEEE