Scaled nanoelectromechanical (NEM) hybrid devices
説明
This paper overviews recent attempts at co-integrating nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional Si devices in ‘More-than-Moore’ domain and also explore novel physical principles in ‘Beyond CMOS’ domain.
収録刊行物
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- 2011 IEEE International Conference on IC Design & Technology
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2011 IEEE International Conference on IC Design & Technology 1-4, 2011-05-01
IEEE