Nano-Creep Test for Anatase Polycrystalline Films

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<jats:title>ABSTRACT</jats:title><jats:p>We introduce an analytical technique for time-dependent deformation behavior of the polycrystalline films using a nano-indenter. This technique permits evaluation of structural deformation of the nanometer scale of the thin films. In this paper, good accuracy conditions were determined to measure deformation behavior of the polycrystalline films. The polycrystalline films of anatase were used to investigate the grain boundary structure. We prove that the analysis of time-dependent deformation behavior is effective to investigate the structure of the polycrystalline films.</jats:p>

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  • MRS Proceedings

    MRS Proceedings 695 2001-01-01

    Springer Science and Business Media LLC

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