A Piezoelectric pseudo-static Actuator For Large Displacement Under AC Voltage Operation
説明
A new driving mechanism of a microactuator is reported. The actuator is composed of folded suspensions and a mass. The driving mechanism is interesting because the actuator generates large static displacement when over all structure oscillates at a higher mode resonance. Since this phenomenon (pseudo-static displacement) was observed in the actuator made of various materials, it seems to be an effect common to this shape of actuator, and can be applied to design a small actuator which generates large static displacement with low driving voltage. This paper deals with the typical structure of the actuator and mechanical characteristics of pseudo-static displacement.
収録刊行物
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- Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
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Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 1 389-392, 2005-08-25
IEEE
