Microfabricated Pd and Pd–25Ag alloy membranes

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Abstract Defect-free Pd membrane with the thickness of 2.5 μm and Pd–25Ag alloy membranes with the thickness of 1.2 and 3 μm were successfully prepared on 50 μm thick Ni layer with channel structure by micro-electro-mechanical systems (MEMS) technology. Hydrogen permeation experiment was performed in a conventional gas permeation apparatus within the temperature range of 473–673 K using high purity hydrogen. Hydrogen permeance of the 2.5 μm thick Pd membrane increased by 2.9–4.1 times after the annealing at 673 K owing to the enhanced surface reaction. However, the 1.2 and 3 μm thick Pd–25Ag alloy membrane had lower hydrogen permeance than the 2.5 μm thick Pd membrane because the surface reaction was rate limiting. The surface morphology of the Pd and Pd–25Ag alloy membranes were examined by scanning electron microscope (SEM) before and after the hydrogen permeation.

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