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Reduction of thermal conductivity in periodic silicon nanostructures
Description
We investigate the impact of various phonon scattering mechanisms on the in-plane thermal conductivity of suspended silicon thin films with two-dimensional periodic arrays of holes, i.e. phononic crystal (PnC) nanostructures. We find that thermal conductivity is mostly determined by the surface-to-volume ratio, but as the characteristic size of the structure is reduced down to several tens of nanometers, thermal conductivity becomes independent of the surface-to-volume ratio, lattice type, and other geometrical parameters, being controlled solely by the distance between adjacent holes (neck size).
Journal
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- 2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS)
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2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS) 1-1, 2016-06-01
IEEE