How to sensitively measure the rate of neutral free radical production by photo-deionization of negative ion beams

Two measurement methods to determine the rate of neutral free radical production by the photo-deionization of negative ion beams ( PDINIB ) are introduced. These methods, namely, photoelectron-current measurement by low-frequency electro-modulation probe ( PMMP ) and measurement of decrease in the negative-ion beam current ( DNIC ) were employed to evaluate the production rate in a trail surface-processing apparatus developed in the author"s laboratory utilizing a steady-flux refined beam of neutral free radicals produced by the PDINIB procedure. A 63Cu- negative ion beam of kinetic energy Ei varied up to 15 keV was irradiated with a 514.5 nm visible light beam from a 25 W CW Ar+ ion laser. The detection limit of the production rate by the PMMP setup was as high as 6×109/s under the condition that Ei = 15keV, the negative ion beam current Ii = 4 μA, and the laser power P = 6W. The DNIC method is simpler but less reliable than the PMMP method owing to larger uncertainty resulting from the fluctuation of the negative-ion beam current.© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.