Measurement Of Adsorbed Moisture Concentration On Various Kinds Of Solid Surfaces By Using Anhydrous Hydrogen Fluoride
説明
We have studied a new measurement method of moisture molecule concentrations adsorbed on solid surface by using Anhydrous Hydrogen Fluoride(AHF) that was able to dissolve adsorbed moisture molecules and dissociate them to ions. After adsorbed moisture molecules on solid surface was dissolved into AHF, the amount of dissolved moisture were then determined by measuring the variation of electric conductivity of AHF. This new measurement method made it possible to measure the moisture molecule concentrations adsorbed on solid surfaces exposed to the atmosphere having high moisture concentrations. It has been found that the amount of adsorbed moisture molecule concentrations on solid surfaces in the atmosphere with 1% at 25 C is 2.5x1016 molecules/cm 2 in equilibrium.
収録刊行物
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- International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM
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International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM 211-212, 2005-08-24
IEEE
