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Micromachining Of Silica Glasses With 157nm F/sub 2/ Laser Radiation
Journal
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- Technical Digest CLEO/Pacific Rim '97 Pacific Rim Conference on Lasers and Electro-Optics
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Technical Digest CLEO/Pacific Rim '97 Pacific Rim Conference on Lasers and Electro-Optics 214-214, 2005-08-24
IEEE
