Electron behavior in inhomogeneous DC discharges
説明
Summary form only given. The radial dependence of the electron energy distribution function in N/sub 2/ and He positive columns is measured by a Langmuir probe. The discharge is produced in a 1.8 cm-/spl phi/ glass chamber, in which the gas pressure is from 0.32 Torr to 1.0 Torr and the discharge current range from 20 mA to 100 mA.
収録刊行物
-
- IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science
-
IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science 144-, 2002-11-22
IEEE