Fabrication of periodically-inverted GaAs waveguides for quasi-phase-matching nonlinear optical devices
説明
A process developed for fabricating high-quality periodically-inverted GaAs waveguides based on sublattice reversal epitaxy and regrowth technique is presented. By using this process, we can fabricate low-loss GaAs wavelength conversion devices with /spl sim/ 6 /spl mu/m QPM periods.
収録刊行物
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- CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on Lasers and Electro-Optics (IEEE Cat. No.03TH8671)
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CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on Lasers and Electro-Optics (IEEE Cat. No.03TH8671) 1 76-76, 2004-07-08
IEEE