<title>Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry</title>

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Dispersion of ellipsometrical angles analyzed using theoretical model as well as over measured data is presented. Binary multilayer grating is modeled via rigorous coupled wave method. The special attention is devoted to additional oxidation of inter-dot area and to an interaction of finite optical beam with super-long-period structure. The results are discussed in the relation to experimental data.

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