A Compact Nuclear Microprobe With a Liquid Metal Ion Source and a Toroidal Analyzer
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<jats:title>Abstract</jats:title><jats:p>A nondestructive three-dimensional RBS/channeling analysis system with an atomic resolution has been designed and is being constructed in Osaka University for analysis of nanostructured surfaces and interfaces. An ultra high-vacuum sample-chamber with a threeaxis goniometer and a toroidal electrostatic analyzer for medium energy ion scattering (MEIS) was combined with a short acceleration column for a focused ion beam. A liquid metal ion source (LMIS) for light metal ions such as Li<jats:sup>+</jats:sup> or Be<jats:sup>+</jats:sup> was mounted on the short column.</jats:p><jats:p>A minimum beam spot-size of about 10 nm with a current of 10 pA is estimated by optical property calculation for 200 keV Li<jats:sup>+</jats:sup> LMIS. An energy resolution of 4 × 10<jats:sup>-3</jats:sup> (AE/E) for the toroidal analyzer gives rise to atomic resolution in RBS spectra for Si and GaAs. This system seems feasible for atomic level analysis of localized crystalline/disorder structures and surfaces.</jats:p>
収録刊行物
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- MRS Proceedings
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MRS Proceedings 295 1992-01-01
Springer Science and Business Media LLC