Electrical Properties of PZT Prepared by Pulsed Laser Ablation on Various Electrodes
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<jats:title>ABSTRACT</jats:title><jats:p>The effect of various electrodes on the ferroelectric properties of lead-zirconate-titanate (Pb(Zr<jats:sub>0.52</jats:sub>Ti<jats:sub>0.48</jats:sub>)O<jats:sup>3</jats:sup> PZT) films through the film structure is presented. All the PZT films were deposited by pulsed laser ablation (PLA) using an ArF excimer laser. For electrode materials, YBa<jats:sub>2</jats:sub>Cu<jats:sub>3</jats:sub>O<jats:sub>7</jats:sub> (YBCO) and Ni-alloy were deposited by pulsed laser ablation and sputtering, respectively. As a result various kinds of PZT films with various film structures were obtained. These experiments revealed that there is no simple correlation between the film structure and the fatigue resistance. The fatigue resistance is, however, found to be improved primarily by decreasing the switched-charge density, although the correlation shows some ambiguity. This suggests that the large polarization reversal accelerates the fatigue but there remained the possibility that the fatigue resistance is improved by the optimization of the film structure and film-substrate interface.</jats:p>
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- MRS Proceedings
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MRS Proceedings 361 1994-01-01
Springer Science and Business Media LLC
