- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Automatic Translation feature is available on CiNii Labs
- Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Amorphous carbon film preparation by shunting arc discharge in vacuum
Description
Diamond-like carbon film (DLC) was deposited by PBII&D method using a carbon shunting arc discharge in vacuum. The prepared film was in a state of amorphous and its surface is clean and smooth. A pulse or DC voltage of 0 to -15 kV is applied to the substrate with any filtering method to eliminate droplets. A future prospect of the various film preparations using the shunting arc discharge was also discussed.
Journal
-
- Digest of Technical Papers. PPC-2003. 14th IEEE International Pulsed Power Conference (IEEE Cat. No.03CH37472)
-
Digest of Technical Papers. PPC-2003. 14th IEEE International Pulsed Power Conference (IEEE Cat. No.03CH37472) 1 567-570, 2004-07-08
IEEE
