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Dependence of stacking fault and twin densities on deposition conditions during 3C-SiC heteroepitaxial growth on on-axis Si(100) substrates

Bibliographic Information

Title
Dependence of stacking fault and twin densities on deposition conditions during 3C-SiC heteroepitaxial growth on on-axis Si(100) substrates
Author
Jungheum Yun, T.Takahashi, Y.Ishida, H.Okumura

Journal

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Details

  • CRID
    1010000781605401473
  • Article Type
    journal article
  • Data Source
    • KAKEN

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