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Integrated Conical Spring Linear Actuators for Tilting-Mirror Applications
Bibliographic Information
- Title
- Integrated Conical Spring Linear Actuators for Tilting-Mirror Applications
- Author
- T.Fukushige, S.Hata, A.Shimokohbe
Journal
-
- 31st International Conference on Micro- and Nano-Engineering 2005 Abstracts
-
31st International Conference on Micro- and Nano-Engineering 2005 Abstracts 2005
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Details 詳細情報について
-
- CRID
- 1010000781621005184
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
