Integrated Conical Spring Linear Actuators for Tilting-Mirror Applications
書誌事項
- タイトル
- Integrated Conical Spring Linear Actuators for Tilting-Mirror Applications
- 著者
- T.Fukushige, S.Hata, A.Shimokohbe
収録刊行物
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- 31st International Conference on Micro- and Nano-Engineering 2005 Abstracts
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31st International Conference on Micro- and Nano-Engineering 2005 Abstracts 2005