Flow Condition in Resist Spray and Patterning Performance for Three-Dimensional Photolithographyover Deep Structures
Bibliographic Information
- Title
- Flow Condition in Resist Spray and Patterning Performance for Three-Dimensional Photolithographyover Deep Structures
- Author
- V.Singh, M.Sasaki, K.Hane, M.Esashi
Journal
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- Japanese Journal of Applied Physics 43
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Japanese Journal of Applied Physics 43 2387-2391, 2004
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Details 詳細情報について
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- CRID
- 1010000781775975573
-
- Article Type
- journal article
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- Data Source
-
- KAKEN
