Arrhenius and non-Arrhenius behavior during anisotropic etching
Bibliographic Information
- Title
- Arrhenius and non-Arrhenius behavior during anisotropic etching
- Author
- M.A.Gosalvez, R.M.Nieminen, K.Sato
Journal
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- Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #13
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Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #13 1-6, 2004
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Details 詳細情報について
-
- CRID
- 1010000781776670596
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
