High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors

Bibliographic Information

Title
High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors
Author
H.Sunami, K.Okuyama

Journal

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Details 詳細情報について

  • CRID
    1010000781779746447
  • Article Type
    journal article
  • Data Source
    • KAKEN

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