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High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors
Bibliographic Information
- Title
- High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors
- Author
- H.Sunami, K.Okuyama
Journal
-
- Abs.of 31^<st> Internat.Conf.on Micro-Nano-Engineering No.11 B_03
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Abs.of 31^<st> Internat.Conf.on Micro-Nano-Engineering No.11 B_03 2005
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Details 詳細情報について
-
- CRID
- 1010000781779746447
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
