High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors
書誌事項
- タイトル
- High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors
- 著者
- H.Sunami, K.Okuyama
- 公開日
- 2005
- 資源種別
- journal article
収録刊行物
-
- Abs.of 31^<st> Internat.Conf.on Micro-Nano-Engineering No.11 B_03
-
Abs.of 31^<st> Internat.Conf.on Micro-Nano-Engineering No.11 B_03 2005