High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors
書誌事項
- タイトル
- High-Aspect-Ratio Structure Formation Techniques for Three-Dimensional Metal-Oxide-Semiconductor Transistors
収録刊行物
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- Abs.of 31^<st> Internat.Conf.on Micro-Nano-Engineering No.11 B_03
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Abs.of 31^<st> Internat.Conf.on Micro-Nano-Engineering No.11 B_03 2005