Substrate Dependence of Crystallization of Silicon Films Prepared by Hydrogen Radical CVD Method
Bibliographic Information
- Title
- Substrate Dependence of Crystallization of Silicon Films Prepared by Hydrogen Radical CVD Method
- Author
- K.Kimura, T.Shirasawa, N.Kobayashi, K.Kamisako
Journal
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- Proc.29^<th> IEEE Photovoltaic Specialists Conference (New Orleans, May 2002)
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Proc.29^<th> IEEE Photovoltaic Specialists Conference (New Orleans, May 2002) 1270-1273, 2002
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Details 詳細情報について
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- CRID
- 1010000781790470785
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- Article Type
- journal article
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- Data Source
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- KAKEN