Substrate Dependence of Crystallization of Silicon Films Prepared by Hydrogen Radical CVD Method

Bibliographic Information

Title
Substrate Dependence of Crystallization of Silicon Films Prepared by Hydrogen Radical CVD Method
Author
K.Kimura, T.Shirasawa, N.Kobayashi, K.Kamisako

Journal

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Details 詳細情報について

  • CRID
    1010000781790470785
  • Article Type
    journal article
  • Data Source
    • KAKEN

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