Atomic fluorine anion storage emission material C12A7-F- and etching of Si and SiO2 by atomic fluorine anions
Bibliographic Information
- Title
- Atomic fluorine anion storage emission material C12A7-F- and etching of Si and SiO2 by atomic fluorine anions
Journal
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- CHEMISTRY OF MATERIALS 20(10)
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CHEMISTRY OF MATERIALS 20(10) 34473-3479, 2008
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Details 詳細情報について
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- CRID
- 1010000781800329857
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- Article Type
- journal article
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- Data Source
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- KAKEN