[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Atomic fluorine anion storage emission material C12A7-F- and etching of Si and SiO2 by atomic fluorine anions

Bibliographic Information

Title
Atomic fluorine anion storage emission material C12A7-F- and etching of Si and SiO2 by atomic fluorine anions
Author
Song, Chongfu

Journal

Related Projects

See more

Details

  • CRID
    1010000781800329857
  • Article Type
    journal article
  • Data Source
    • KAKEN

Report a problem

Back to top