Atomic fluorine anion storage emission material C12A7-F- and etching of Si and SiO2 by atomic fluorine anions
Bibliographic Information
- Title
- Atomic fluorine anion storage emission material C12A7-F- and etching of Si and SiO2 by atomic fluorine anions
- Author
- Song, Chongfu
Journal
-
- CHEMISTRY OF MATERIALS 20(10)
-
CHEMISTRY OF MATERIALS 20(10) 34473-3479, 2008
- Tweet
Details 詳細情報について
-
- CRID
- 1010000781800329857
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN