Atomic fluorine anion storage emission material C12A7-F- and etching of Si and SiO2 by atomic fluorine anions
書誌事項
- タイトル
- Atomic fluorine anion storage emission material C12A7-F- and etching of Si and SiO2 by atomic fluorine anions
- 著者
- Song, Chongfu
収録刊行物
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- CHEMISTRY OF MATERIALS 20(10)
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CHEMISTRY OF MATERIALS 20(10) 34473-3479, 2008
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詳細情報
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- CRID
- 1010000781800329857
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- 資料種別
- journal article
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- データソース種別
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- KAKEN