Effect of Oxygen Addition to Methane on Growth of Vertically Oriented Carbon Nanotubes by Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition
-
- 片山 光浩
- 大阪大学
書誌事項
- タイトル
- Effect of Oxygen Addition to Methane on Growth of Vertically Oriented Carbon Nanotubes by Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition
収録刊行物
-
- Journal of Applied Physics Vol.97,No.10
-
Journal of Applied Physics Vol.97,No.10 2005