Carbon Effect on Strain Compensation in Si_<1-x-y>Ge_xC_y Films Epitaxially Grown on Si(100)

Bibliographic Information

Title
Carbon Effect on Strain Compensation in Si_<1-x-y>Ge_xC_y Films Epitaxially Grown on Si(100)
Author
H.Nitta et al.

Journal

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Details 詳細情報について

  • CRID
    1010000781801414805
  • Article Type
    journal article
  • Data Source
    • KAKEN

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