Carbon Effect on Strain Compensation in Si_<1-x-y>Ge_xC_y Films Epitaxially Grown on Si(100)
Bibliographic Information
- Title
- Carbon Effect on Strain Compensation in Si_<1-x-y>Ge_xC_y Films Epitaxially Grown on Si(100)
- Author
- H.Nitta et al.
Journal
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- Thin Solid Films (in press)(掲載予定)
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Thin Solid Films (in press)(掲載予定) 2006
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Details 詳細情報について
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- CRID
- 1010000781801414805
-
- Article Type
- journal article
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- Data Source
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- KAKEN