Carbon Effect on Strain Compensation in Si_<1-x-y>Ge_xC_y Films Epitaxially Grown on Si(100)
書誌事項
- タイトル
- Carbon Effect on Strain Compensation in Si_<1-x-y>Ge_xC_y Films Epitaxially Grown on Si(100)
- 著者
- H.Nitta et al.
収録刊行物
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- Thin Solid Films (in press)(掲載予定)
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Thin Solid Films (in press)(掲載予定) 2006