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Electron-temperature control by varying dc voltage to a mesh grid covered by thin insulator film in plasmas
Bibliographic Information
- Title
- Electron-temperature control by varying dc voltage to a mesh grid covered by thin insulator film in plasmas
- Author
- Kohgi, Kato
Journal
-
- The XXVII International Conference on Phenomena in Ionized Gases
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The XXVII International Conference on Phenomena in Ionized Gases 10-233, 2005
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Details 詳細情報について
-
- CRID
- 1010000781804775052
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN