Electron-temperature control by varying dc voltage to a mesh grid covered by thin insulator film in plasmas

Bibliographic Information

Title
Electron-temperature control by varying dc voltage to a mesh grid covered by thin insulator film in plasmas
Author
Kohgi, Kato

Journal

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Details 詳細情報について

  • CRID
    1010000781804775052
  • Article Type
    journal article
  • Data Source
    • KAKEN

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