Electron-temperature control by varying dc voltage to a mesh grid covered by thin insulator film in plasmas
書誌事項
- タイトル
- Electron-temperature control by varying dc voltage to a mesh grid covered by thin insulator film in plasmas
- 著者
- Kohgi, Kato
収録刊行物
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- The XXVII International Conference on Phenomena in Ionized Gases
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The XXVII International Conference on Phenomena in Ionized Gases 10-233, 2005
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詳細情報
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- CRID
- 1010000781804775052
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- 資料種別
- journal article
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- データソース種別
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- KAKEN