Reduction of dislocation density in AlGaN with high AlN molar fraction by using a rugged AlN epilayer
Bibliographic Information
- Title
- Reduction of dislocation density in AlGaN with high AlN molar fraction by using a rugged AlN epilayer
- Author
- Akira Ishiga
Journal
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- Material Research Society Symposium Proceedings Vol.831
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Material Research Society Symposium Proceedings Vol.831 2005
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Details 詳細情報について
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- CRID
- 1010000781805072001
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- Article Type
- journal article
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- Data Source
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- KAKEN