Reduction of dislocation density in AlGaN with high AlN molar fraction by using a rugged AlN epilayer

Bibliographic Information

Title
Reduction of dislocation density in AlGaN with high AlN molar fraction by using a rugged AlN epilayer
Author
Akira Ishiga

Journal

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Details 詳細情報について

  • CRID
    1010000781805072001
  • Article Type
    journal article
  • Data Source
    • KAKEN

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