Reduction of dislocation density in AlGaN with high AlN molar fraction by using a rugged AlN epilayer
書誌事項
- タイトル
- Reduction of dislocation density in AlGaN with high AlN molar fraction by using a rugged AlN epilayer
- 著者
- Akira Ishiga
収録刊行物
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- Material Research Society Symposium Proceedings Vol.831
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Material Research Society Symposium Proceedings Vol.831 2005