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Fabrication of Si field emitter array in local vacuum Package
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- SAWADA Kazuaki
- Toyohashi University of Technology, Faculty of Engineering, Associate Professor
Bibliographic Information
- Title
- Fabrication of Si field emitter array in local vacuum Package
- Author
- Daiji Noda, Masanori Hatakeyama, Masanori Kyogoku, Kimiya Ikushima, Kazuaki Sawada, Makoto Ishida
Journal
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- 17th International Vacuum Nanoelectronics Conference, Ray and Maria Stata Center, Massachusetts Institute of Technology, Cambridge, MA, USA, 11-16 July
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17th International Vacuum Nanoelectronics Conference, Ray and Maria Stata Center, Massachusetts Institute of Technology, Cambridge, MA, USA, 11-16 July 292-293, 2004
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Details 詳細情報について
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- CRID
- 1010000781805416613
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- Article Type
- journal article
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- Data Source
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- KAKEN
