High-Resolution Anger Depth Profiling by sub-keV Ion Sputlering
Bibliographic Information
- Title
- High-Resolution Anger Depth Profiling by sub-keV Ion Sputlering
- Author
- M.Inoue, R.Shimizu, H.I.Lee, H.J.Kong
Journal
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- Surf.& Interf.Anal. 37
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Surf.& Interf.Anal. 37 167-170, 2005
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Details
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- CRID
- 1010000781812556800
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- Article Type
- journal article
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- Data Source
-
- KAKEN