A Numerical Technique for the Analysis of MEMS Structures using the Coupling of Electromagnetic and Mechanical Equations

Bibliographic Information

Title
A Numerical Technique for the Analysis of MEMS Structures using the Coupling of Electromagnetic and Mechanical Equations
Author
Kohei Kawano, Noriyuki Miura, Michiko Kuroda, Manos M.Tentzeris

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Details

  • CRID
    1010000781812947468
  • Article Type
    journal article
  • Data Source
    • KAKEN

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