A Numerical Technique for the Analysis of MEMS Structures using the Coupling of Electromagnetic and Mechanical Equations
書誌事項
- タイトル
- A Numerical Technique for the Analysis of MEMS Structures using the Coupling of Electromagnetic and Mechanical Equations
- 著者
- Kohei Kawano, Noriyuki Miura, Michiko Kuroda, Manos M.Tentzeris
収録刊行物
-
- PIERS2004 (Progress of International Electromagnetic Research Symposium)
-
PIERS2004 (Progress of International Electromagnetic Research Symposium) 2004
