Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier
Bibliographic Information
- Title
- Resonance-free Millimeter-wave Coplanar Waveguide Si Microelectromechanical System Package Using a Lightly-doped Silicon Chip Carrier
- Author
- Y.T.Song et al.
Journal
-
- Jap. J. of Applied Physics 44・4A
-
Jap. J. of Applied Physics 44・4A 129-133, 2005
- Tweet
Details
-
- CRID
- 1010000781869870722
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
